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Semiconductor Equipment Components > Sapphire showerheads, Sapphire parts
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Sapphire offers the highest strength, purity, and durability in aggressive process environments using NF3 and CF4 . Sapphire showerhead, GDP’s and rings replace high turnover parts that quickly erode in plasma.

Many plasma applications would not be viable without sapphire parts such as showerheads, rings, and gas delivery plates

  • Engineered sapphire showerheads provide uniform distribution over entire wafer surface
  • Long lifetime – without process drift due to hole or diameter erosion
  • Reduced particle generation
  • Reduced downtime for parts replacement
  • Gavish engineering always available to assist in new sapphire component designs, and to convert from problematic, high turnover quartz or ceramic parts to dimensionally equivalent sapphire versions.
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