Sapphire tubes and Sapphire injectors for Semiconductor Process Equipment and other based on customer applications
Share This Class:
Overview
Using aggressive gases or chemistries such as NF3 andCF4 rapidly erode quartz and ceramic components leading to high part turnover, excessive downtime for part replacement, and high particle counts. Sapphire is acid-insoluble to hydrofluoric acid, fluorine or aggressive gases, offers extremely high purity and long life, corrosion and abrasive resistant material with superior dielectric and thermos conductive features to 2000ºC. In many applications, sapphire presents more sable and beneficial properties vs quartz or ceramics materials. .
Sapphire tubes
- Typical dimensions ranging from 1” to 1.5” (25 to 38 mm OD), with diameters to 3” (76 mm) and lengths to 30” (750 mm
- Product geometry could be considered based on the customer drawing.
- Outer diameters could be precisely ground or left with “as grown” finish
- Inner diameter is left with “as grown” finish – which proves to be optimal in contact with plasma
Spray injector nozzles
Sapphire material is one of the hardest materials available for use in the spray nozzle business replacing ceramic, quartz, and metals. Sapphire spray nozzles provide effective use preventive erosion resulting effect of deterioration of the spray quality. Sapphire spray nozzles offer high wear resistance, giving a more consistent spray performance and excellent spray quality over a longer period reducing maintenance time and increasing uptime respectively.
- Numerous configurations typically ranging from 0.3 – 0.4” inner diameter range (8 – 10 mm ID) with lengths from 1.5” up to 8” (38 to 200+ mm)
- Versions include open ended or with sealed/ported versions for directing plasma flow with tapered versions also available.
Thermocouple protection sheaths
replacing quartz and silicon carbide (SiC) for multi-point thermocouples used in horizontal and vertical furnaces.
- Usable at temperatures up to 2000ºC, sapphire thermocouple protection tubes covering most of high temperature application where use of quartz or ceramics is limited.
- High Thermal conductive material without any kind of contaminations
- Obsessive resistant material prevents possible damage of thermocouples
- Superior hardness provide long life time
- The most typical versions are 0.394” OD with 0.315” ID with lengths in the 44 – 48” range. (10 mm OD x 8 mm ID x 1148 – 1200+ mm length).
